Investigation of the Method of Dynamic Microwave Power Redistribution in a Resonator-Type Plasmatron
Keywords:microwave plasma, microwave power, redistribution, dissector
AbstractThe investigation results of a dynamic microwave power fmicrowave = 2, 45 ± 0,05 GHz redistribution in a 9000 cm3 reaction-discharge chamber of a microwave resonator-type plasmatron are presented. In order to redistribute the microwave power, a rotating metallic four-blade L-form dissector placed above the reaction-discharge chamber was used. The microwave power in the local points at the axis of the chamber with plasma and without it was measured applying the "active probe" method. During the experiments the chamber contained silicon plates. Periodical interchange of maximum and minimum microwave power values along the chamber axis was established experimentally. Note, when the dissector was rotating, the range of maximum and minimum "active probe" values dispersion decreased. It has been established that during the dissector rotation the microwave power in the local discharge areas changes with periodic repetition every quarter of revolution.
M. Moisan and J. Pelletier. Microwave Excited Plasmas. Amsterdam: Elsevier, 1992.
S. V. Bordusov. Microwave plasma technologies in the production of electronic devices. Minsk: Bestprint, 2002.
M. Moisan and J. Pelletier. Physics of Collisional Plasma. Introduction to High-Frequency Discharges. Dordrecht: Springer, 2012.
C. Boisse-Laporte and J. Marec, editors. Microwave discharges: fundamentals and applications Proc. 3rd Int. Workshop (Fontevraud, France, 20-25 April 1997). France: EDP Sciences, 1998.
A. Ohl, editor. Microwave discharges: fundamentals and applications Proc. 5th Int. Workshop (Greifswald, Germany, 8-12 July 2003). Greifswald: INP, 2003.
M. Kando and M. Nagatsu, editors. Microwave discharges: fundamentals and applications Proc. 7th Int.Workshop (Hamamatsu, Japan, 22-27 September 2009). Japan, 2009.
Y. A. Lebedev, editor. Microwave discharges: fundamentals and applications Proc. 8th Int. Workshop (Zvenigorod, Russia, 10-14 September 2012). Moscow: Yanus-K, 2012.
Y. A. Lebedev. Microwave discharges at low pressures and peculiarities of the processes in strongly non-uniform plasma. Plasma Sources Science and Technology, 24(5):053001, 2015. doi:10.1088/0963-0252/24/5/053001.
T. Nakano and S. Samukawa. The correlation between an electric ﬁeld and the metastable chlorine ion density distributions in an ultrahigh-frequency plasma. Japanese Journal of Applied Physics, 37(5R):2686–2692, 1998. doi:10.1143/JJAP.37.2686.
Plasmatic Systems. Plasma-preen plasma cleaning/etching system. URL: http://www.plasmapreen.com.
Terra Universal. Plasma-preen cleaner/etcher (patent pending). URL: https://www.terrauniversal.com/cleaning-systems/plasma-preen-cleaners.php.
A. I. Kuzmichev. Ion plasma sources based on a microwave oven. Instruments and Experimental Techniques, 37(05):176–180, 1994.
V. M. Batenin, I. I. Klimovsky, G. V. Lysov, and V. N. Troizky. Microwave Plasma Generators: Physics, Engineering, Applications. Moscow: Energoatomizdat, 1988.
S. I. Madveika and S. V. Bordusau. Theoretical analysis of low vacuum microwave discharge exciting and maintaining conditions in resonator type plasmatron. Plasma Physics and Technology, 2(2):155–158, 2015.
S. V. Bordusau, S. I. Madveika, and A. P. Dostanko. Investigation of microwave energy distribution character in a resonator type plasmatron. Plasma Physics and Technology, 3(3):122–125, 2016.
E. Okress. Microwave power engineering. Number 1 in Electrical science series. Academic Press, 1968.
J. Doehler. Large area microwave plasma apparatus with adaptable applicator, April 3 2001. US Patent 6.209.482. URL: https://encrypted.google.com/patents/US6209482.
Authors who publish with this journal agree to the following terms:
- Authors retain copyright and grant the journal right of first publication with the work simultaneously licensed under a Creative Commons Attribution License that allows others to share the work with an acknowledgement of the work's authorship and initial publication in this journal.
- Authors are able to enter into separate, additional contractual arrangements for the non-exclusive distribution of the journal's published version of the work (e.g., post it to an institutional repository or publish it in a book), with an acknowledgement of its initial publication in this journal.
- Authors are permitted and encouraged to post their work online (e.g., in institutional repositories or on their website) prior to and during the submission process, as it can lead to productive exchanges, as well as earlier and greater citation of published work (See The Effect of Open Access).