Optical Emission Spectroscopy of Magnethron Discharge Ar/Cu Plasma
Keywords:magnetron, argon plasma, spectroscopy, Boltzmann plots
AbstractPlasma parameters (excitation temperature and electron density) of pulsing magnetron discharge is studied by optical emission spectroscopy. Such discharges are usually used as effective sources in sputtering or deposition processes. Vapor admixtures in argon plasma define mainly the temperature and electron density in such discharges. This is the feature, which is typically takes place in plasma of discharge between contacts/electrodes in switching devices of electric technology circuits.
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