Feedbacks in Non-equilibrium Oxidative Plasma Reacting with Polyethylene

Authors

  • D. V. Kadnikov Department of technology devices and materials for electronic equipment, Ivanovo State University of Chemistry and Technology, Sheremetevsky Avenue 7, 153000, Ivanovo
  • A. A. Ovtsyn Department of technology devices and materials for electronic equipment, Ivanovo State University of Chemistry and Technology, Sheremetevsky Avenue 7, 153000, Ivanovo
  • S. A. Shibaev Department of technology devices and materials for electronic equipment, Ivanovo State University of Chemistry and Technology, Sheremetevsky Avenue 7, 153000, Ivanovo
  • S. A. Smirnov Department of technology devices and materials for electronic equipment, Ivanovo State University of Chemistry and Technology, Sheremetevsky Avenue 7, 153000, Ivanovo

DOI:

https://doi.org/10.14311/ppt.2017.1.104

Keywords:

air plasma, oxygen plasma, loading effect, gas temperature, reduced electric field strength, polyethylene

Abstract

The experimental results on studies of loading effect at the action of a glow DC discharge in oxygen and air on polyethylene film are presented. At the increase in a polymer amount under a treatment the specific rates of etching and CO2, CO, H2O, H2 product formation rates are decreased. The gas temperature is changed slightly. The reduced electric field strength is increased in oxygen plasma and decreased in air plasma.

References

B. Lamontegne, A.M. Wrobel, G. Jelbert, and M.P. Wertheimer. Large - area microwave plasma etching of polyimide. J. Phys. D: Appl. Phys., 20(7):844–850, 1987.

D. Economau, E.S. Audit, and G. Barno. In situ monitoring of etching uniformity in plasma reactors. Solid State Technology, 34(4):107–111, 1991.

V.V. Rybkin and V.A. Titov. Kinetics and mechanisms of oxidative plasma interaction with polymers. In V.Ye. Fortov YU.A. Lebedev, N.A. Plate, editor, Entsiklopediya nizkotemperaturnoi plazmy, volume VIII-1. Chemistry of low-temperature plasma. of B, page 130. Moscow: Nauka, 2005.

A. M. Diamy, J. C. Legrand, V.V. Rybkin, and S.A. Smirnov. Experimental study and modelling of formation and decay of active species in an oxygen discharge. Contrib. PlasmaPhys., 45(1):5–21, 2005.

S.A. Smirnov, V.V. Rybkin, A.N. Ivanov, and V.A. Titov. The simulation of the processes of formation and decay of neutral particles in dc discharge plasma in an argon-oxygen mixture. High Temperature, 45(3):291–297, 2007.

S.A. Smirnov, V.V. Rybkin, and I.V. Kholodkov. Simulation of the processes of formation and dissociation of neutral particles in air plasma: Vibration kinetics of ground states of n2, o2 and no molecules. High Temperature, 40(2):161–165, 2002.

Kajita S., Ushiroda S., and Kondo V. Influence of the dissociation process of oxygen on the electron’s warm parameters in oxygen. J. Appl. Phys., 67(9):4015, 1990.

Y. Itikawa. Cross section for electron collision with carbon dioxide. J. Phys. Chem. Ref. Data, 31(3):749, 2002.

J.E. Land. Electron scattering cross sections for momentum transfer and inelastic excitation in carbon monoxide. Journal of Applied Physics, 49:5716, 1978.

Rybkin V.V., Titov V.A., and Holodkov I.V. Kinetic characteristics and cross section for electron collision with water molecules. J. Izv. Vyssh. Uchebn. Zaved. Khim. Khim. Technol., 51(3):617, 2008.

Nishimura H. Yoshino M. Tawara H., Itikawa Y. Cross sections and related data for electron collisions with hydrogen molecules and molecular ions. J. Phys.Chem. Ref. Data, 19(3):617, 1990.

Gordiets B.F., Ferreira C.M., Guerra V.L., and et al. Kinetic model of a low-pressure n2 − o2 flowing glow discharge. IEEE Transactions on Plasma Science, 23(4):750, 1995.

Rybkin V.V., Titov V.A., and Holodkov I.V. Kinetic characteristics and cross section for electron collision with no. J. Izv. Vyssh. Uchebn. Zaved. Khim. Khim. Technol., 52(12):3, 2009.

Kuvaldina E.V., Shutov D.A., Rybkin V.V., and Smirnov S.A. Kinetics of gaseous product formation in the surface treatment of polypropylene with nitrogen-oxygen plasmas. High Energy Chemistry, 38(3):200, 2004.

Rybkin V.V., Smirnov S.A., and Titov V.A. Populations of lower vibrational levels of n2 (x1σg+) and their effect on some characteristics of electrons in air plasma. High Energy Chemistry, 31(5):352, 1997.

Titov V.A., Rybkin V.V., and Smirnov S.A. Physicochemical processes in the nonequilibrium plasma-polymer system. High Energy Chemistry, 43(3):172, 2009.

S.A. Smirnov, V.A. Titov, and V.V. Rybkin. Influence of heterogeneous physicochemical processes on the parameters of low-temperature plasma. Russian Journal of General Chemistry, 85(5):1260, 2015.

Downloads

Published

2017-10-15

Issue

Section

Articles