Application Of Rf (13.56 MHz) Arc Discharge For Plasma Chemical Conversion Of Volatile Fluorides
DOI:
https://doi.org/10.14311/ppt.2017.2.169Keywords:
RF arc discharge, boron fluoride, silicon fluoride, molybdenum fluorideAbstract
The report discusses the use of a new type of plasma source of hydrogen plasma based on a RF (13.56 MHz) arc discharge of atmospheric pressure between two electrodes. This discharge was used for hydrogen reduction of the tetrafluorides of silicon, boron and molybdenum. As a result of the studies, the main regularities of the hydrogen reduction process were established and the main synthesized products were determined. Samples of carbides of silicon, boron and molybdenum were prepared.References
E. M. Aisen et al. Study of isotope separation of some chemical elements in a gas centrifuge. Nuclear Instruments and Methods in Physics Research, 374(1):127–131, 1996. doi:10.1016/0168-9002(96)00065-4.
NUCLEAR ENERGY AGENCY. The Supply of Medical Isotopes. Review of Potential Molybdenum-99/Technetium-99m Production Technologies., 2010. http://www.oecd-nea.org/med-radio/reports/Med-Radio-99Mo-Prod-Tech.pdf.
V. D. Risovany et al. Molybdenum carbide nano-powder for production of Mo-99 radionuclides. World Journal of Nuclear Science and Technology, 2(2):58–63, 2012. doi:10.4236/wjnst.2012.22010.
F. Thevenot et al. Boron carbide − a comprehensive review. Journal of the European Ceramic Society, 6(4):205–225, 1990. doi:10.1016/0955-2219(90)90048-K.
T. D. Ladd et al. An all silicon quantum computer. Physical Review Letters, 89(1):017901(1–4), 2002.
I. C. Kizilyalli et al. Power transistors fabricated using isotopically purified silicon 28Si. IEEE Electron. Device Lett., 26(6):404–406, 2005. doi:10.1109/LED.2005.848111.
T. Noda et al. Silicon isotope enrichment for low activation. Fusion Engineering and Design, 41:173–179, 1998. doi:10.1016/S0920-3796(98)00186-0.
P. G. Sennikov et al. A study of silicon tetrafluoride reduction with hydrogen in radiofrequency discharge. Russian Journal of High Energy Chemistry, 48(1):49–53, 2014. doi:10.1134/S0018143914010123.
R. Kornev et al. Hydrogen reduction of 98MoF6 in RF discharge. J.Radioanal. Nucl.Chemistr, 309:833–840, 2016. doi:10.1007/s10967-015-4687-z.
R. Kornev et al. Gas-dynamic and thermal processes in the synthesis of trichlorosilane by hydrogen reduction of silicon tetrachloride in a high-frequency discharge. Russian Journal of Applied Chemistry, 87(9):1246–1250, 2014. doi:10.1134/S1070427214090092.
Yu. P. Raizer. Fizika gazovogo razryada. Second printing. Nauka, Moscow, Russia, 1987.
D. Yanin et al. Diagnostics of the atmospheric-pressure plasma parameters using the method of near-field microwave sounding. Technical Physics. The Russian Journal of Applied Physics, 57(4):468–477, 2012. doi:10.1134/S1063784212040251.
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