Application Of Rf (13.56 MHz) Arc Discharge For Plasma Chemical Conversion Of Volatile Fluorides


  • R. A. Kornev G.G. Devyatykh Institute of Chemistry of High-Purity Substances of RAS, Nizhny Novgorod
  • P. G. Sennikov G.G. Devyatykh Institute of Chemistry of High-Purity Substances of RAS, Nizhny Novgorod
  • V. V. Nazarov Institute of Applied Physics RAS, Nizhny Novgorod



RF arc discharge, boron fluoride, silicon fluoride, molybdenum fluoride


The report discusses the use of a new type of plasma source of hydrogen plasma based on a RF (13.56 MHz) arc discharge of atmospheric pressure between two electrodes. This discharge was used for hydrogen reduction of the tetrafluorides of silicon, boron and molybdenum. As a result of the studies, the main regularities of the hydrogen reduction process were established and the main synthesized products were determined. Samples of carbides of silicon, boron and molybdenum were prepared.


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