Express Method for Diagnosing Microwave Plasmatron Work Stability within the Range of Plasma-Inducing Gas Pressures

Authors

  • S.V. Bordusau
  • S.I. Madveika
  • A.P. Dostanko

Abstract

An express method of microwave plasmatron work stability diagnostics within the range of gas at low pressure has been worked out. Its use makes possible to reduce the duration of process of defining gas pressure value characterized by high repetition in time of the impulse plasma forming process.

References

Bordusov S. Microwave plasma technologies in the production of electronic devices / Minsk: Bestprint, 2002. 450 p.

Microwave plasma generators: physics, technics, applications / V.M. Batenin [et al.] M.: Energoatomizdat, 1988. 224 p.

Microwave Discharges: Fundamentals and Applications. 3 – rd International Workshop, Abbaye Royale de Fontevraud, France, 20 – 25 April, 1997 // Journal de Physique IV, 1998. Vol.8. Pr 7. 421 p.

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Published

2014-04-04

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Articles