High Power Impulse Magnetron Sputtering of CIGS Thin Films for High Efficiency Thin Film Solar Cells

Authors

  • J. Olejníček
  • Z. Hubička
  • M. Kohout
  • P. Kšírová
  • Š. Kment
  • M. Brunclíková
  • M. Čada
  • S. A. Darveau
  • C. L. Exstrom

Keywords:

CIGS, HiPIMS, emission spectroscopy, thin films, magnetron sputtering

Abstract

In this work CuIn1-xGaxSe2 (CIGS) thin films with three different values of x (0; 0.28; 1) were prepared
by nonreactive sputtering of Cu, In and Ga in HiPIMS (High Power Impulse Magnetron Sputtering) or
DC magnetron and subsequently selenized in an Ar+Se atmosphere. Optical emission spectroscopy
(OES) was used to monitor some basic plasma parameters during sputtering of metallic precursors. CIGS
thin film characteristics were measured using X-ray diffraction (XRD), scanning electron microscopy
(SEM), Raman spectroscopy, energy-dispersive X-ray spectroscopy (EDX) and other techniques.

References

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Olejníček J., Hubička Z., Virostko P., Deyneka A., Jastrabík L., Chvostová D., Šíchová H. and Pokorný J., Integr Ferroelectr 81 (2006) 227-237.

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Published

2014-08-10

Issue

Vol. 1 No. 3 (2014)

Section

Articles

License

Copyright (c) 2014 J. Olejníček, Z. Hubička, M. Kohout, P. Kšírová, Š. Kment, M. Brunclíková, M. Čada, S. A. Darveau, C. L. Exstrom

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