The Device for Dynamic Matching of the E-type Discharge Plasma System and Output Tract of Electric Pulses Generator
Keywords:
plasma, electric generator, matchingAbstract
To reduce the reactivity of a glow pulse discharge, the device for stepwise matching of the communica-tion channel of the power stage of electric pulses generator exciting plasma and the plasma discharge as a dynamic load was developed and tested. The peculiarity of this device is the use of a wide range soft-ware-controlled inductive element. The use of mixed analog and digital units circuitry provides stable regulation of inductance from 600 μH to 20 mH. Experimental testing of the device with the E-type dis-charge system at frequencies from 5 kHz to 60 kHz showed a decrease of the phase shift between the current pulses and the discharge voltage and the reduction of the spurious emissions on power pulses tra-jectories. It makes possible to increase the energy efficiency of plasma process and reliability of the op-eration of pulse generator with plasma as a load.
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Copyright (c) 2015 D. V. Godun, S.V. Bordusau, A. P. Dostanko
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