Sennikov, P., Institute of Chemistry of High-Purity Substances Russian Academy of Sciences, Russian Federation
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PLASMA PHYSICS AND TECHNOLOGY Vol. 6 No. 2 (2019) - Articles
Study of the Conversion of Carbon-containing and Organochlorine Impurities in the Process of Hydrogen Reduction of Silicon Tetrachloride by RF (40.68 MHz) Arc Discharge.
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PLASMA PHYSICS AND TECHNOLOGY Vol. 6 No. 2 (2019) - Articles
Application of RF (13.56 MHz) Arc Discharge for Plasma Chemical Conversion of Volatile Chlorides of Silicon and Germanium.
Abstract PDF