Deposition of Fluorocarbon Plasma Polymer Nanoparticles and their Basic Properties
Keywords:
poly(tetrafluoroethylene), magnetron sputtering, plasma polymerization, superhydrophobicAbstract
Fluorocarbon plasma polymer nanoparticles have been fabricated using gas aggregation cluster source (GAS) equipped with a planar magnetron with PTFE target. A beam of nanoparticles 20 – 200 nm in diameter was generated. Fluorocarbon nanoparticle films have shown very good water repellent properties. Films immersed in ethanol for two hours exhibited excellent stability that was also good in case of water. Measurements using a deflection system showed the presence of both neutral and charged nanoparticles.
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Copyright (c) 2015 A. Serov, A. Choukourov, A. Artemenko, A. Kuzminova, H. Biederman, M. Hrabovsky
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