Borduleva, A. O., Bleykher, G. A., Sidelev, D. V., & Krivobokov, V. P. (2016). MAGNETRON SPUTTERING WITH HOT SOLID TARGET: THERMAL PROCESSES AND EROSION. Acta Polytechnica, 56(6), 425–431. https://doi.org/10.14311/AP.2016.56.0425