, National Research Tomsk Polytechnic University Department of Experimental Physics, Russian Federation
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Acta Polytechnica Vol. 56 No. 6 (2016) - Articles
MAGNETRON SPUTTERING WITH HOT SOLID TARGET: THERMAL PROCESSES AND EROSION
Abstract PDF
ISSN 1805–2363 (online)
ISSN 1210–2709 (print - terminated to Vol. 61 No. 6 (2021))
Czech Technical University in Prague, Jugoslávských partyzánů 1580/3, 160 00 Praha 6 – Dejvice, Czech Republic
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