Kornev, R. A., G.G. Devyatykh Institute of Chemistry of High-Purity Substances of RAS, Nizhny Novgorod, Russian Federation

• PLASMA PHYSICS AND TECHNOLOGY Vol. 4 No. 2 (2017) - Articles
  Application Of Rf (13.56 MHz) Arc Discharge For Plasma Chemical Conversion Of Volatile Fluorides
  Abstract  PDF