STRUCTURING OF DIAMOND FILMS USING MICROSPHERE LITHOGRAPHY

Authors

  • Mária Domonkos Institute of Physics, Academy of Sciences of the Czech Republic v.v.i., Cukrovarnická 10/112, 162 53 Praha
  • Tibor Ižák Institute of Physics, Academy of Sciences of the Czech Republic v.v.i., Cukrovarnická 10/112, 162 53 Praha
  • Lucie Štolcová Department of Physical Electronics, Faculty of Nuclear Sciences and Physical Engineering, Czech Technical University in Prague, Brehová 7, 115 19 Praha
  • Jan Proška Department of Physical Electronics, Faculty of Nuclear Sciences and Physical Engineering, Czech Technical University in Prague, Brehová 7, 115 19 Praha
  • Pavel Demo Department of Physics, Faculty of Civil Engineering, Czech Technical University in Prague, Thákurova 7, 166 29 Praha 6
  • Alexander Kromka Institute of Physics, Academy of Sciences of the Czech Republic v.v.i., Cukrovarnická 10/112, 162 53 Praha

DOI:

https://doi.org/10.14311/AP.2014.54.0320

Abstract

In this study, the structuring of micro- and nanocrystalline diamond thin films is demonstrated. The structuring of the diamond films is performed using the technique of microsphere lithography followed by reactive ion etching. Specifically, this paper presents a four-step fabrication process: diamond deposition (microwave plasma assisted chemical vapor deposition), mask preparation (by the standard Langmuir-Blodgett method), mask modification and diamond etching. A self-assembled monolayer of monodisperse polystyrene (PS) microspheres with close-packed ordering is used as the primary template. Then the PS microspheres and the diamond films are processed in capacitively coupled radiofrequency plasma  using different plasma chemistries. This fabrication method illustrates the preparation of large arrays of periodic and homogeneous hillock-like structures. The surface morphology of processed diamond films is characterized by scanning electron microscopy and atomic force microscope. The potential applications of such diamond structures in various fields of nanotechnology are also briefly discussed.

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Published

2014-10-31

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Articles