MODERNIZATION FEATURES OF A VACUUM INSTALLATION BASED ON LOW-PRESSURE ARC DISCHARGE FOR COMPOSITE TIN-CU LAYERS FORMATION

Dmitriy Tsyrenov, Aleksandr Semenov, Natalia Smirnyagina

Abstract


A hybrid technology for forming composite TiN-Cu layers under the combined influence of a magnetron and low pressure arc discharges has been designed. The parameters of the plasma generator have been studied. The technological parameters for layer deposition in the conditions of coordinated action of the vacuum arc evaporator and the planar magnetron have been studied. This report describes the phase composition of TiN-Cu layers and the structure on fused silica substrates.

Refbacks

  • There are currently no refbacks.


Creative Commons License
This work is licensed under a Creative Commons Attribution 4.0 International License.

ISSN 1210-2709 (Print)
ISSN 1805-2363 (Online)
Published by the Czech Technical University in Prague